The development of new ways to measure objects and surfaces at the nano scale has allowed dimensional inspection providers to improve both accuracy and speed. It has also enabled the measurement of larger samples and objects with different surface types, as well as provide better 3D imaging capability.

Surface finish analysis is one of the most common applications of nano measurement, primarily because this field requires a high level of precision. Specialized equipment is necessary because traditional dimensional inspection technology is not able to capture surface characteristics such as texture, sharpness, flatness, and wear at the Nano level.